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1

Gettering of Fe at the End of Range Loops in Fe-Implanted InP

C. Frigeri, A. Carnera, A. Gasparotto, F. Priolo, B. Fraboni, A. Camporese, G. Rosetto

Journal:

physica status solidi (a)

Year:

1999

Language:

english

File:

PDF, 197 KB

english, 1999

2

Defect characterization in InP substrates implanted with 2 MeV Fe ions

C. Frigeri, A. Carnera, B. Fraboni, A. Gasparotto, A. Cassa, F. Priolo, A. Camporese, G. Rossetto

Journal:

Materials Science and Engineering: B

Year:

1997

Language:

english

File:

PDF, 682 KB

english, 1997

3

MeV energy implantation of Fe in InP

A. Carnera, A. Gasparotto, A. Scordilli, F. Priolo, C. Frigeri, G. Rossetto

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Year:

1995

Language:

english

File:

PDF, 540 KB

english, 1995

4

Electron-microscopy study of Fe-implanted InP

C. Frigeri,A. Carnera,A. Gasparotto

Journal:

Applied Physics A: Materials Science & Processing

Year:

1996

Language:

english

File:

PDF, 932 KB

english, 1996

5

[IEEE 1993 (5th) International Conference on Indium Phosphide and Related Materials - Paris, France (19-22 April 1993)] 1993 (5th) International Conference on Indium Phosphide and Related Materials - On the production of semi-insulating buried layers in epitaxially grown InP by Fe ion implantation

Carnera, A., Gasparotto, A., Caldironi, M., Pellegrino, S., Tromby, M., Vidimari, F., Frigeri, C.

Year:

1993

Language:

english

File:

PDF, 392 KB

english, 1993

6

Interaction between Fe, dopants, and secondary defects in MeV Fe ion implanted InP

Gasparotto, Andrea, Carnera, Alberto, Frigeri, Cesare, Priolo, Francesco, Fraboni, Beatrice, Camporese, Andrea, Rossetto, Gilberto

Journal:

Journal of Applied Physics

Year:

1999

Language:

english

File:

PDF, 630 KB

english, 1999

7

Erratum: ‘‘Production of semi-insulating layers in n-doped InP by Fe implantation’’ [J. Appl. Phys. 76, 5085 (1994)]

Carnera, A., Gasparotto, A., Tromby, M., Caldironi, M., Pellegrino, S., Vidimari, F., Bocchi, C., Frigeri, C.

Journal:

Journal of Applied Physics

Year:

1995

Language:

english

File:

PDF, 299 KB

english, 1995

8

Production of semi-insulating layers in n-doped InP by Fe implantation

Carnera, A., Gasparotto, A., Tromby, M., Caldironi, M., Pellegrino, S., Vidimari, F., Bocchi, C., Frigeri, C.

Journal:

Journal of Applied Physics

Year:

1994

Language:

english

File:

PDF, 1.82 MB

english, 1994

9

Influence of the Dislocation Loops on the Anomalous Diffusion of Fe Implanted into InP

Frigeri, C., Carnera, A., Fraboni, B., Gasparotto, A., Priolo, F., Camporese, A., Rossetto, G.

Journal:

Materials Science Forum

Year:

1997

File:

PDF, 527 KB

1997

10

Extended Defects in Fe-Implanted InP After Thermal Annealing

Frigeri, C., Bocchi, C., Carnera, A., Gasparotto, A., Gambacorti, N., Longo, F.

Journal:

MRS Proceedings

Year:

1993

Language:

english

File:

PDF, 2.59 MB

english, 1993

11

Dose and Doping Dependence of Damage Annealing in Fe Mev Implanted Inp

Carnera, A., Fraboni, B., Gasparotto, A., Priolo, F., Camporese, A., Rossetto, G., Frigeri, C., Cassa, A.

Journal:

MRS Proceedings

Year:

1995

Language:

english

File:

PDF, 2.87 MB

english, 1995